Only a 92 or 93 MAF will work for you.
A 92-94 TPS from an L27, or a 92-95 TPS from an L67 should fit.
The TPS is hermetically sealed with potting compound. I doubt any damage was done by the carb cleaner, unless it was to the plastic outer case, and that should be visible. Check the connector to make sure there isn't some juice in there.
Both the MAF and TPS failures will cause obvious performance issues. Your cruise control may not work right, throttle response will be iffy at best, and you'll run too rich or too lean. Are you observing any of this? Do you have an SES light?
NEVER use carb cleaner on an Throttle body of a newer car. Carb cleaner is for carbs, intake cleaner is for intakes and throttle bodies. Always remove the MAF sensor before cleaning, and remove the TB from the car to clean it, or you may be wasting your time.